Warpage Detection during Baking of Semiconductor substrate in Microlithography
IECON Proceedings (Industrial Electronics Conference)
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2014
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sg-nus-scholar.10635-721802015-01-19T02:03:50Z Warpage Detection during Baking of Semiconductor substrate in Microlithography Ho, W.K. Tay, A. Lim, K.W. Zhou, Y. Yang, K. ELECTRICAL & COMPUTER ENGINEERING Fault Detection Microlithography Temperature Measurement Wafer Warpage IECON Proceedings (Industrial Electronics Conference) 3 2271-2276 IEPRE 2014-06-19T03:32:22Z 2014-06-19T03:32:22Z 2003 Conference Paper Ho, W.K.,Tay, A.,Lim, K.W.,Zhou, Y.,Yang, K. (2003). Warpage Detection during Baking of Semiconductor substrate in Microlithography. IECON Proceedings (Industrial Electronics Conference) 3 : 2271-2276. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72180 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
Fault Detection Microlithography Temperature Measurement Wafer Warpage |
| spellingShingle |
Fault Detection Microlithography Temperature Measurement Wafer Warpage Ho, W.K. Tay, A. Lim, K.W. Zhou, Y. Yang, K. Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| description |
IECON Proceedings (Industrial Electronics Conference) |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Tay, A. Lim, K.W. Zhou, Y. Yang, K. |
| format |
Conference or Workshop Item |
| author |
Ho, W.K. Tay, A. Lim, K.W. Zhou, Y. Yang, K. |
| author_sort |
Ho, W.K. |
| title |
Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| title_short |
Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| title_full |
Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| title_fullStr |
Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| title_full_unstemmed |
Warpage Detection during Baking of Semiconductor substrate in Microlithography |
| title_sort |
warpage detection during baking of semiconductor substrate in microlithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/72180 |
| _version_ |
1681087518851727360 |