Charging identification and compensation in the scanning electron microscope
Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
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2014
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sg-nus-scholar.10635-725202024-11-13T21:15:41Z Charging identification and compensation in the scanning electron microscope Wong, W.K. Thong, J.T.L. Phang, J.C.H. ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA 97-102 00234 2014-06-19T05:08:58Z 2014-06-19T05:08:58Z 1997 Conference Paper Wong, W.K.,Thong, J.T.L.,Phang, J.C.H. (1997). Charging identification and compensation in the scanning electron microscope. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 97-102. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72520 NOT_IN_WOS Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Wong, W.K. Thong, J.T.L. Phang, J.C.H. |
| format |
Conference or Workshop Item |
| author |
Wong, W.K. Thong, J.T.L. Phang, J.C.H. |
| spellingShingle |
Wong, W.K. Thong, J.T.L. Phang, J.C.H. Charging identification and compensation in the scanning electron microscope |
| author_sort |
Wong, W.K. |
| title |
Charging identification and compensation in the scanning electron microscope |
| title_short |
Charging identification and compensation in the scanning electron microscope |
| title_full |
Charging identification and compensation in the scanning electron microscope |
| title_fullStr |
Charging identification and compensation in the scanning electron microscope |
| title_full_unstemmed |
Charging identification and compensation in the scanning electron microscope |
| title_sort |
charging identification and compensation in the scanning electron microscope |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/72520 |
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1821206409498329088 |