In-lens deflectors for an LVSEM magnetic immersion objective lens

10.1117/12.279403

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Bibliographic Details
Main Authors:	Zhao, Y., Khursheed, A.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Deflector Immersion objective lens In-lens deflection MOL SEM
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72701
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72701
record_format	dspace
spelling	sg-nus-scholar.10635-727012024-11-09T02:43:31Z In-lens deflectors for an LVSEM magnetic immersion objective lens Zhao, Y. Khursheed, A. ELECTRICAL ENGINEERING Deflector Immersion objective lens In-lens deflection MOL SEM 10.1117/12.279403 Proceedings of SPIE - The International Society for Optical Engineering 3155 37-46 PSISD 2014-06-19T05:11:01Z 2014-06-19T05:11:01Z 1997 Conference Paper Zhao, Y., Khursheed, A. (1997). In-lens deflectors for an LVSEM magnetic immersion objective lens. Proceedings of SPIE - The International Society for Optical Engineering 3155 : 37-46. ScholarBank@NUS Repository. https://doi.org/10.1117/12.279403 0277786X http://scholarbank.nus.edu.sg/handle/10635/72701 A1997BJ74Q00004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Deflector Immersion objective lens In-lens deflection MOL SEM
spellingShingle	Deflector Immersion objective lens In-lens deflection MOL SEM Zhao, Y. Khursheed, A. In-lens deflectors for an LVSEM magnetic immersion objective lens
description	10.1117/12.279403
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Zhao, Y. Khursheed, A.
format	Conference or Workshop Item
author	Zhao, Y. Khursheed, A.
author_sort	Zhao, Y.
title	In-lens deflectors for an LVSEM magnetic immersion objective lens
title_short	In-lens deflectors for an LVSEM magnetic immersion objective lens
title_full	In-lens deflectors for an LVSEM magnetic immersion objective lens
title_fullStr	In-lens deflectors for an LVSEM magnetic immersion objective lens
title_full_unstemmed	In-lens deflectors for an LVSEM magnetic immersion objective lens
title_sort	in-lens deflectors for an lvsem magnetic immersion objective lens
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72701
_version_	1821212937473228800

In-lens deflectors for an LVSEM magnetic immersion objective lens

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