A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging

A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging

10.1109/OMEMS.2010.5672202

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Bibliographic Details
Main Authors: Mu, X., Xu, Y., Singh, J., Chen, N., Feng, H., Zhou, G., Yu, A., Tan, C.W., Chen, K.W.S., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73032
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Institution: National University of Singapore
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Summary:10.1109/OMEMS.2010.5672202

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