A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging
10.1109/OMEMS.2010.5672202
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Main Authors: | Mu, X., Xu, Y., Singh, J., Chen, N., Feng, H., Zhou, G., Yu, A., Tan, C.W., Chen, K.W.S., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73032 |
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Institution: | National University of Singapore |
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