Macro-modelling of a double-gimballed electrostatic torsional micromirror

10.1088/0960-1317/13/5/303

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Bibliographic Details
Main Authors: Zhou, G., Tay, F.E.H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60666
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Institution: National University of Singapore