Macro-modelling of a double-gimballed electrostatic torsional micromirror
10.1088/0960-1317/13/5/303
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2014
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sg-nus-scholar.10635-606662023-10-26T07:52:19Z Macro-modelling of a double-gimballed electrostatic torsional micromirror Zhou, G. Tay, F.E.H. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/13/5/303 Journal of Micromechanics and Microengineering 13 5 532-547 JMMIE 2014-06-17T06:25:55Z 2014-06-17T06:25:55Z 2003-09 Article Zhou, G., Tay, F.E.H., Chau, F.S. (2003-09). Macro-modelling of a double-gimballed electrostatic torsional micromirror. Journal of Micromechanics and Microengineering 13 (5) : 532-547. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/13/5/303 09601317 http://scholarbank.nus.edu.sg/handle/10635/60666 000185656000003 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1088/0960-1317/13/5/303 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Zhou, G. Tay, F.E.H. Chau, F.S. |
| format |
Article |
| author |
Zhou, G. Tay, F.E.H. Chau, F.S. |
| spellingShingle |
Zhou, G. Tay, F.E.H. Chau, F.S. Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| author_sort |
Zhou, G. |
| title |
Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| title_short |
Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| title_full |
Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| title_fullStr |
Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| title_full_unstemmed |
Macro-modelling of a double-gimballed electrostatic torsional micromirror |
| title_sort |
macro-modelling of a double-gimballed electrostatic torsional micromirror |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60666 |
| _version_ |
1781781891442016256 |