Macro-modelling of a double-gimballed electrostatic torsional micromirror
10.1088/0960-1317/13/5/303
Saved in:
Main Authors: | , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60666 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Be the first to leave a comment!