A novel nano-mechanical displacement detection based on a photonic nanowire waveguides coupler

A novel nano-mechanical displacement detection based on a photonic nanowire waveguides coupler

10.1117/12.901080

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Bibliographic Details
Main Authors: Chew, X., Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
displacement sensing
MEMS/NEMS
Nanophotonic sensor
silicon photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73071
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Institution: National University of Singapore
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Summary:10.1117/12.901080

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