Design and modeling of nanophotonic beam structures as optical NEMS sensors

Design and modeling of nanophotonic beam structures as optical NEMS sensors

10.1117/12.762049

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Bibliographic Details
Main Authors: Lee, C., Thillaigovindan, J., Yu, A., Radhakrishnan, R., Chen, C.-C., Chao, Y.-T., Lau, J.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Nanophotonics
NEMS
Sensor
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69840
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69840

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