Optical NEMS based force sensor using silicon nanophotonics

Optical NEMS based force sensor using silicon nanophotonics

10.1109/OMEMS.2007.4373828

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Bibliographic Details
Main Authors: Lee, C., Radhakrishnan, R., Chen, C.-C., Li, J., Balasubramanian, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Force
Nanophotonics
Optical NEMS
Sensor
Strain
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71272
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/71272

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