Optical NEMS based force sensor using silicon nanophotonics

• Main Authors: Lee, C., Radhakrishnan, R., Chen, C.-C., Li, J., Balasubramanian, N.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Force; Nanophotonics; Optical NEMS; Sensor; Strain
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71272
• Institution: National University of Singapore

10.1109/OMEMS.2007.4373828