Design and modeling of nanophotonic beam structures as optical NEMS sensors
10.1117/12.762049
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2014
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sg-nus-scholar.10635-698402023-10-30T20:37:14Z Design and modeling of nanophotonic beam structures as optical NEMS sensors Lee, C. Thillaigovindan, J. Yu, A. Radhakrishnan, R. Chen, C.-C. Chao, Y.-T. Lau, J.H. ELECTRICAL & COMPUTER ENGINEERING MEMS Nanophotonics NEMS Sensor 10.1117/12.762049 Proceedings of SPIE - The International Society for Optical Engineering 6900 - PSISD 2014-06-19T03:05:17Z 2014-06-19T03:05:17Z 2008 Conference Paper Lee, C., Thillaigovindan, J., Yu, A., Radhakrishnan, R., Chen, C.-C., Chao, Y.-T., Lau, J.H. (2008). Design and modeling of nanophotonic beam structures as optical NEMS sensors. Proceedings of SPIE - The International Society for Optical Engineering 6900 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.762049 9780819470751 0277786X http://scholarbank.nus.edu.sg/handle/10635/69840 000254740500022 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
MEMS Nanophotonics NEMS Sensor |
| spellingShingle |
MEMS Nanophotonics NEMS Sensor Lee, C. Thillaigovindan, J. Yu, A. Radhakrishnan, R. Chen, C.-C. Chao, Y.-T. Lau, J.H. Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| description |
10.1117/12.762049 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Lee, C. Thillaigovindan, J. Yu, A. Radhakrishnan, R. Chen, C.-C. Chao, Y.-T. Lau, J.H. |
| format |
Conference or Workshop Item |
| author |
Lee, C. Thillaigovindan, J. Yu, A. Radhakrishnan, R. Chen, C.-C. Chao, Y.-T. Lau, J.H. |
| author_sort |
Lee, C. |
| title |
Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| title_short |
Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| title_full |
Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| title_fullStr |
Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| title_full_unstemmed |
Design and modeling of nanophotonic beam structures as optical NEMS sensors |
| title_sort |
design and modeling of nanophotonic beam structures as optical nems sensors |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69840 |
| _version_ |
1781783119242723328 |