An improved formulation for scheduling an automated wet-etch station

An improved formulation for scheduling an automated wet-etch station

10.1016/j.compchemeng.2004.07.007

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Bibliographic Details
Main Authors: Karimi, I.A., Tan, Z.Y.L., Bhushan, S.
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Flowshop
MILP
Scheduling
Shared resource
Wafer fabrication
Wet-etch station
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74482
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/74482

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