Characterization of deep wet etching of glass

• Main Authors: Iliescu, C., Chen, B., Tay, F.E.H., Xu, G., Miao, J.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Etch rate; Masking layers; Wet etching of glass
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/85895
• Institution: National University of Singapore

10.1117/12.638521