Characterization of deep wet etching of glass

Characterization of deep wet etching of glass

10.1117/12.638521

Saved in:
Bibliographic Details
Main Authors: Iliescu, C., Chen, B., Tay, F.E.H., Xu, G., Miao, J.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Etch rate
Masking layers
Wet etching of glass
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85895
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1117/12.638521

Similar Items