Characterization of deep wet etching of glass

10.1117/12.638521

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Bibliographic Details
Main Authors:	Iliescu, C., Chen, B., Tay, F.E.H., Xu, G., Miao, J.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Etch rate Masking layers Wet etching of glass
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85895
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85895
record_format	dspace
spelling	sg-nus-scholar.10635-858952023-10-25T22:17:16Z Characterization of deep wet etching of glass Iliescu, C. Chen, B. Tay, F.E.H. Xu, G. Miao, J. MECHANICAL ENGINEERING Etch rate Masking layers Wet etching of glass 10.1117/12.638521 Proceedings of SPIE - The International Society for Optical Engineering 6037 - PSISD 2014-10-07T09:13:27Z 2014-10-07T09:13:27Z 2006 Conference Paper Iliescu, C., Chen, B., Tay, F.E.H., Xu, G., Miao, J. (2006). Characterization of deep wet etching of glass. Proceedings of SPIE - The International Society for Optical Engineering 6037 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.638521 0277786X http://scholarbank.nus.edu.sg/handle/10635/85895 000236541000010 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Etch rate Masking layers Wet etching of glass
spellingShingle	Etch rate Masking layers Wet etching of glass Iliescu, C. Chen, B. Tay, F.E.H. Xu, G. Miao, J. Characterization of deep wet etching of glass
description	10.1117/12.638521
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Chen, B. Tay, F.E.H. Xu, G. Miao, J.
format	Conference or Workshop Item
author	Iliescu, C. Chen, B. Tay, F.E.H. Xu, G. Miao, J.
author_sort	Iliescu, C.
title	Characterization of deep wet etching of glass
title_short	Characterization of deep wet etching of glass
title_full	Characterization of deep wet etching of glass
title_fullStr	Characterization of deep wet etching of glass
title_full_unstemmed	Characterization of deep wet etching of glass
title_sort	characterization of deep wet etching of glass
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85895
_version_	1781784780050792448

Characterization of deep wet etching of glass

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