Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
10.1109/JSTQE.2009.2016436
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sg-nus-scholar.10635-749422023-10-25T22:21:18Z Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning Xu, Y. Singh, J. Selvaratnam, T. Chen, N. BIOENGINEERING Electrothermal effects Microelectromechanical devices Micromachining 10.1109/JSTQE.2009.2016436 IEEE Journal on Selected Topics in Quantum Electronics 15 5 1432-1438 IJSQE 2014-06-19T08:59:17Z 2014-06-19T08:59:17Z 2009-09 Conference Paper Xu, Y., Singh, J., Selvaratnam, T., Chen, N. (2009-09). Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1432-1438. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2016436 1077260X http://scholarbank.nus.edu.sg/handle/10635/74942 000270950300021 Scopus |
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Electrothermal effects Microelectromechanical devices Micromachining |
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Electrothermal effects Microelectromechanical devices Micromachining Xu, Y. Singh, J. Selvaratnam, T. Chen, N. Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
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10.1109/JSTQE.2009.2016436 |
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BIOENGINEERING |
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BIOENGINEERING Xu, Y. Singh, J. Selvaratnam, T. Chen, N. |
format |
Conference or Workshop Item |
author |
Xu, Y. Singh, J. Selvaratnam, T. Chen, N. |
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Xu, Y. |
title |
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
title_short |
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
title_full |
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
title_fullStr |
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
title_full_unstemmed |
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
title_sort |
two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/74942 |
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