Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning

10.1109/JSTQE.2009.2016436

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Main Authors: Xu, Y., Singh, J., Selvaratnam, T., Chen, N.
Other Authors: BIOENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74942
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spelling sg-nus-scholar.10635-749422023-10-25T22:21:18Z Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning Xu, Y. Singh, J. Selvaratnam, T. Chen, N. BIOENGINEERING Electrothermal effects Microelectromechanical devices Micromachining 10.1109/JSTQE.2009.2016436 IEEE Journal on Selected Topics in Quantum Electronics 15 5 1432-1438 IJSQE 2014-06-19T08:59:17Z 2014-06-19T08:59:17Z 2009-09 Conference Paper Xu, Y., Singh, J., Selvaratnam, T., Chen, N. (2009-09). Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1432-1438. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2016436 1077260X http://scholarbank.nus.edu.sg/handle/10635/74942 000270950300021 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Electrothermal effects
Microelectromechanical devices
Micromachining
spellingShingle Electrothermal effects
Microelectromechanical devices
Micromachining
Xu, Y.
Singh, J.
Selvaratnam, T.
Chen, N.
Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
description 10.1109/JSTQE.2009.2016436
author2 BIOENGINEERING
author_facet BIOENGINEERING
Xu, Y.
Singh, J.
Selvaratnam, T.
Chen, N.
format Conference or Workshop Item
author Xu, Y.
Singh, J.
Selvaratnam, T.
Chen, N.
author_sort Xu, Y.
title Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
title_short Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
title_full Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
title_fullStr Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
title_full_unstemmed Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
title_sort two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/74942
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