Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning

Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning

10.1109/JSTQE.2009.2016436

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Bibliographic Details
Main Authors: Xu, Y., Singh, J., Selvaratnam, T., Chen, N.
Other Authors: BIOENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrothermal effects
Microelectromechanical devices
Micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74942
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/74942

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