Electrostatic spring effect on the dynamic performance of microresonators

Electrostatic spring effect on the dynamic performance of microresonators

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

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Bibliographic Details
Main Authors: Francis Tay, E.H., Kumaran, R., Chua, B.L., Logeeswaran, V.J.
Other Authors: MECHANICAL & PRODUCTION ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrostatic spring effect
Natural frequency
Resonator
Simulation
Uncertainty analysis
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74991
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Institution: National University of Singapore
id sg-nus-scholar.10635-74991
record_format dspace
spelling sg-nus-scholar.10635-749912015-01-13T18:36:46Z Electrostatic spring effect on the dynamic performance of microresonators Francis Tay, E.H. Kumaran, R. Chua, B.L. Logeeswaran, V.J. MECHANICAL & PRODUCTION ENGINEERING Electrostatic spring effect Natural frequency Resonator Simulation Uncertainty analysis 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 154-157 2014-06-19T09:09:41Z 2014-06-19T09:09:41Z 2000 Conference Paper Francis Tay, E.H.,Kumaran, R.,Chua, B.L.,Logeeswaran, V.J. (2000). Electrostatic spring effect on the dynamic performance of microresonators. 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 : 154-157. ScholarBank@NUS Repository. 0966613570 http://scholarbank.nus.edu.sg/handle/10635/74991 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Electrostatic spring effect
Natural frequency
Resonator
Simulation
Uncertainty analysis
spellingShingle Electrostatic spring effect
Natural frequency
Resonator
Simulation
Uncertainty analysis
Francis Tay, E.H.
Kumaran, R.
Chua, B.L.
Logeeswaran, V.J.
Electrostatic spring effect on the dynamic performance of microresonators
description 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
author2 MECHANICAL & PRODUCTION ENGINEERING
author_facet MECHANICAL & PRODUCTION ENGINEERING
Francis Tay, E.H.
Kumaran, R.
Chua, B.L.
Logeeswaran, V.J.
format Conference or Workshop Item
author Francis Tay, E.H.
Kumaran, R.
Chua, B.L.
Logeeswaran, V.J.
author_sort Francis Tay, E.H.
title Electrostatic spring effect on the dynamic performance of microresonators
title_short Electrostatic spring effect on the dynamic performance of microresonators
title_full Electrostatic spring effect on the dynamic performance of microresonators
title_fullStr Electrostatic spring effect on the dynamic performance of microresonators
title_full_unstemmed Electrostatic spring effect on the dynamic performance of microresonators
title_sort electrostatic spring effect on the dynamic performance of microresonators
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/74991
_version_ 1681088023461101568

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