High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
Ph.D
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| 格式: | Theses and Dissertations |
| 語言: | English |
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2014
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| 在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/79484 |
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| 機構: | National University of Singapore |
| 語言: | English |
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sg-nus-scholar.10635-794842024-10-26T06:21:57Z High Speed Confocal 3D Profilometer: Design, Development, Experimental Results ANG KAR TIEN ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement Ph.D DOCTOR OF PHILOSOPHY 2014-08-31T18:00:33Z 2014-08-31T18:00:33Z 2014-03-19 Thesis ANG KAR TIEN (2014-03-19). High Speed Confocal 3D Profilometer: Design, Development, Experimental Results. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/79484 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement |
| spellingShingle |
Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement ANG KAR TIEN High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| description |
Ph.D |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING ANG KAR TIEN |
| format |
Theses and Dissertations |
| author |
ANG KAR TIEN |
| author_sort |
ANG KAR TIEN |
| title |
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| title_short |
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| title_full |
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| title_fullStr |
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| title_full_unstemmed |
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results |
| title_sort |
high speed confocal 3d profilometer: design, development, experimental results |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/79484 |
| _version_ |
1821211021307543552 |