High Speed Confocal 3D Profilometer: Design, Development, Experimental Results

Ph.D

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Bibliographic Details
Main Author:	ANG KAR TIEN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2014
Subjects:	Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/79484
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-79484
record_format	dspace
spelling	sg-nus-scholar.10635-794842015-01-06T12:05:42Z High Speed Confocal 3D Profilometer: Design, Development, Experimental Results ANG KAR TIEN ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement Ph.D DOCTOR OF PHILOSOPHY 2014-08-31T18:00:33Z 2014-08-31T18:00:33Z 2014-03-19 Thesis ANG KAR TIEN (2014-03-19). High Speed Confocal 3D Profilometer: Design, Development, Experimental Results. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/79484 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement
spellingShingle	Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement ANG KAR TIEN High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING ANG KAR TIEN
format	Theses and Dissertations
author	ANG KAR TIEN
author_sort	ANG KAR TIEN
title	High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_short	High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_full	High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_fullStr	High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_full_unstemmed	High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_sort	high speed confocal 3d profilometer: design, development, experimental results
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/79484
_version_	1681088810138468352

High Speed Confocal 3D Profilometer: Design, Development, Experimental Results

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