High Speed Confocal 3D Profilometer: Design, Development, Experimental Results

Ph.D

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Bibliographic Details
Main Author:	ANG KAR TIEN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2014
Subjects:	Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/79484
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Institution:	National University of Singapore
Language:	English

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