High Speed Confocal 3D Profilometer: Design, Development, Experimental Results

Ph.D

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: ANG KAR TIEN
مؤلفون آخرون: ELECTRICAL & COMPUTER ENGINEERING
التنسيق: Theses and Dissertations
اللغة:English
منشور في: 2014
الموضوعات:
الوصول للمادة أونلاين:http://scholarbank.nus.edu.sg/handle/10635/79484
الوسوم: إضافة وسم
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المؤسسة: National University of Singapore
اللغة: English
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spelling sg-nus-scholar.10635-794842024-10-26T06:21:57Z High Speed Confocal 3D Profilometer: Design, Development, Experimental Results ANG KAR TIEN ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement Ph.D DOCTOR OF PHILOSOPHY 2014-08-31T18:00:33Z 2014-08-31T18:00:33Z 2014-03-19 Thesis ANG KAR TIEN (2014-03-19). High Speed Confocal 3D Profilometer: Design, Development, Experimental Results. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/79484 NOT_IN_WOS en
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
language English
topic Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement
spellingShingle Confocal, profilometry, topography, surface measurement, optical metrology, 3D profile measurement
ANG KAR TIEN
High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
description Ph.D
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
ANG KAR TIEN
format Theses and Dissertations
author ANG KAR TIEN
author_sort ANG KAR TIEN
title High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_short High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_full High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_fullStr High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_full_unstemmed High Speed Confocal 3D Profilometer: Design, Development, Experimental Results
title_sort high speed confocal 3d profilometer: design, development, experimental results
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/79484
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