Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
Japanese Journal of Applied Physics, Part 2: Letters
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80333 |
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| Institution: | National University of Singapore |