Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors

Japanese Journal of Applied Physics, Part 2: Letters

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Main Authors:	Lau, W.S., Goo, C.H.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80333
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-803332024-11-11T16:30:48Z Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors Lau, W.S. Goo, C.H. ELECTRICAL ENGINEERING Japanese Journal of Applied Physics, Part 2: Letters 30 12 A L1996-L1997 JAPLD 2014-10-07T02:56:22Z 2014-10-07T02:56:22Z 1991-12-01 Article Lau, W.S.,Goo, C.H. (1991-12-01). Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors. Japanese Journal of Applied Physics, Part 2: Letters 30 (12 A) : L1996-L1997. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80333 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Japanese Journal of Applied Physics, Part 2: Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lau, W.S. Goo, C.H.
format	Article
author	Lau, W.S. Goo, C.H.
spellingShingle	Lau, W.S. Goo, C.H. Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
author_sort	Lau, W.S.
title	Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
title_short	Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
title_full	Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
title_fullStr	Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
title_full_unstemmed	Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors
title_sort	confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by uv irradiation of nearly hysteresis free metal-nitride-silicon capacitors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80333
_version_	1821197686611640320

Confirmation of the correlation between the electrical hysteresis and silicon dangling bond density in silicon nitride by UV irradiation of nearly hysteresis free metal-nitride-silicon capacitors

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