Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors

Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors

10.1016/j.sna.2004.07.012

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Bibliographic Details
Main Authors: Tun, T.N., Lok, T.S., Jui, T.C., Akkipeddi, R., Rahman, M.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Pressure sensors
Semiconductor
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80337
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-803372023-10-30T08:05:16Z Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors Tun, T.N. Lok, T.S. Jui, T.C. Akkipeddi, R. Rahman, M. ELECTRICAL ENGINEERING MECHANICAL ENGINEERING Pressure sensors Semiconductor Silicon 10.1016/j.sna.2004.07.012 Sensors and Actuators, A: Physical 118 2 190-201 SAAPE 2014-10-07T02:56:25Z 2014-10-07T02:56:25Z 2005-02-28 Article Tun, T.N., Lok, T.S., Jui, T.C., Akkipeddi, R., Rahman, M. (2005-02-28). Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors. Sensors and Actuators, A: Physical 118 (2) : 190-201. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2004.07.012 09244247 http://scholarbank.nus.edu.sg/handle/10635/80337 000227123500003 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Pressure sensors
Semiconductor
Silicon
spellingShingle Pressure sensors
Semiconductor
Silicon
Tun, T.N.
Lok, T.S.
Jui, T.C.
Akkipeddi, R.
Rahman, M.
Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
description 10.1016/j.sna.2004.07.012
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Tun, T.N.
Lok, T.S.
Jui, T.C.
Akkipeddi, R.
Rahman, M.
format Article
author Tun, T.N.
Lok, T.S.
Jui, T.C.
Akkipeddi, R.
Rahman, M.
author_sort Tun, T.N.
title Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
title_short Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
title_full Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
title_fullStr Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
title_full_unstemmed Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors
title_sort contact pressure measurement using silicon-based alxga 1-xas semiconductor pressure sensors
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80337
_version_ 1781783899940061184

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