Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors

Contact pressure measurement using silicon-based AlxGa 1-xAs semiconductor pressure sensors

10.1016/j.sna.2004.07.012

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Bibliographic Details
Main Authors: Tun, T.N., Lok, T.S., Jui, T.C., Akkipeddi, R., Rahman, M.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Pressure sensors
Semiconductor
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80337
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Institution: National University of Singapore
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