Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation
Journal of Applied Physics
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sg-nus-scholar.10635-803402024-11-10T16:36:48Z Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation Lu, Y.F. Choi, W.K. Aoyagi, Y. Kinomura, A. Fujii, K. ELECTRICAL ENGINEERING Journal of Applied Physics 80 12 7052-7056 JAPIA 2014-10-07T02:56:27Z 2014-10-07T02:56:27Z 1996-12-15 Article Lu, Y.F.,Choi, W.K.,Aoyagi, Y.,Kinomura, A.,Fujii, K. (1996-12-15). Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation. Journal of Applied Physics 80 (12) : 7052-7056. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80340 NOT_IN_WOS Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lu, Y.F. Choi, W.K. Aoyagi, Y. Kinomura, A. Fujii, K. |
| format |
Article |
| author |
Lu, Y.F. Choi, W.K. Aoyagi, Y. Kinomura, A. Fujii, K. |
| spellingShingle |
Lu, Y.F. Choi, W.K. Aoyagi, Y. Kinomura, A. Fujii, K. Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| author_sort |
Lu, Y.F. |
| title |
Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| title_short |
Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| title_full |
Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| title_fullStr |
Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| title_full_unstemmed |
Controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| title_sort |
controllable laser-induced periodic structures at silicon-dioxide/silicon interface by excimer laser irradiation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80340 |
| _version_ |
1821188846175387648 |