Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates

Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates

Applied Physics A: Materials Science and Processing

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Bibliographic Details
Main Authors: Yu, J.J., Zhang, J.Y., Boyd, I.W., Lu, Y.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82318
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82318

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