Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates
Applied Physics A: Materials Science and Processing
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2014
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sg-nus-scholar.10635-823182024-11-10T16:37:06Z Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates Yu, J.J. Zhang, J.Y. Boyd, I.W. Lu, Y.F. ELECTRICAL & COMPUTER ENGINEERING Applied Physics A: Materials Science and Processing 72 1 35-39 APAMF 2014-10-07T04:27:58Z 2014-10-07T04:27:58Z 2001-01 Article Yu, J.J.,Zhang, J.Y.,Boyd, I.W.,Lu, Y.F. (2001-01). Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates. Applied Physics A: Materials Science and Processing 72 (1) : 35-39. ScholarBank@NUS Repository. 09478396 http://scholarbank.nus.edu.sg/handle/10635/82318 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
Applied Physics A: Materials Science and Processing |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Yu, J.J. Zhang, J.Y. Boyd, I.W. Lu, Y.F. |
| format |
Article |
| author |
Yu, J.J. Zhang, J.Y. Boyd, I.W. Lu, Y.F. |
| spellingShingle |
Yu, J.J. Zhang, J.Y. Boyd, I.W. Lu, Y.F. Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| author_sort |
Yu, J.J. |
| title |
Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| title_short |
Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| title_full |
Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| title_fullStr |
Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| title_full_unstemmed |
Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| title_sort |
excimer-laser-induced micropatterning of silicon dioxide on silicon substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82318 |
| _version_ |
1821222447434694656 |