Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers

Applied Physics Letters

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Main Authors:	Senapati, B., Samanta, S.K., Maikap, S., Bera, L.K., Maiti, C.K.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80378
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-803782024-11-08T19:05:22Z Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers Senapati, B. Samanta, S.K. Maikap, S. Bera, L.K. Maiti, C.K. ELECTRICAL ENGINEERING Applied Physics Letters 77 12 1840-1842 APPLA 2014-10-07T02:56:53Z 2014-10-07T02:56:53Z 2000-09-18 Article Senapati, B.,Samanta, S.K.,Maikap, S.,Bera, L.K.,Maiti, C.K. (2000-09-18). Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers. Applied Physics Letters 77 (12) : 1840-1842. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/80378 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Applied Physics Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Senapati, B. Samanta, S.K. Maikap, S. Bera, L.K. Maiti, C.K.
format	Article
author	Senapati, B. Samanta, S.K. Maikap, S. Bera, L.K. Maiti, C.K.
spellingShingle	Senapati, B. Samanta, S.K. Maikap, S. Bera, L.K. Maiti, C.K. Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
author_sort	Senapati, B.
title	Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
title_short	Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
title_full	Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
title_fullStr	Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
title_full_unstemmed	Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers
title_sort	effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-si1-xgex layers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80378
_version_	1821187351825612800

Effects of nitric-oxide-plasma treatment on the electrical properties of tetraethylorthosilicate-deposited silicon dioxides on strained-Si1-xGex layers

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