Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films
Physica Status Solidi (A) Applied Research
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2014
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sg-nus-scholar.10635-803862015-02-10T19:20:33Z Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films Choi, W.K. Ong, T.Y. Han, L.J. Loh, F.C. Tan, K.L. PHYSICS ELECTRICAL ENGINEERING Physica Status Solidi (A) Applied Research 169 1 67-76 PSSAB 2014-10-07T02:56:58Z 2014-10-07T02:56:58Z 1998 Article Choi, W.K.,Ong, T.Y.,Han, L.J.,Loh, F.C.,Tan, K.L. (1998). Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films. Physica Status Solidi (A) Applied Research 169 (1) : 67-76. ScholarBank@NUS Repository. 00318965 http://scholarbank.nus.edu.sg/handle/10635/80386 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
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Physica Status Solidi (A) Applied Research |
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PHYSICS |
| author_facet |
PHYSICS Choi, W.K. Ong, T.Y. Han, L.J. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Ong, T.Y. Han, L.J. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Ong, T.Y. Han, L.J. Loh, F.C. Tan, K.L. Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| author_sort |
Choi, W.K. |
| title |
Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| title_short |
Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| title_full |
Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| title_fullStr |
Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| title_full_unstemmed |
Electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| title_sort |
electrical and structural properties of rapid thermal annealed amorphous silicon carbide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80386 |
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1681088877943586816 |