Ion-assisted pulsed laser deposition of aluminum nitride thin films

• Main Authors: Lu, Y.F., Ren, Z.M., Chong, T.C., Cheong, B.A., Chow, S.K., Wang, J.P.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/80641
• Institution: National University of Singapore

Journal of Applied Physics