Ion source assisted pulse laser deposition of carbon nitride thin films

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: He, Z.F., Lu, Y.F., Mai, Z.H., Ren, Z.M.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81502
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Institution: National University of Singapore