Ion source assisted pulse laser deposition of carbon nitride thin films

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: He, Z.F., Lu, Y.F., Mai, Z.H., Ren, Z.M.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81502
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-815022015-04-03T23:51:17Z Ion source assisted pulse laser deposition of carbon nitride thin films He, Z.F. Lu, Y.F. Mai, Z.H. Ren, Z.M. ELECTRICAL ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3898 404-412 PSISD 2014-10-07T03:08:59Z 2014-10-07T03:08:59Z 1999 Conference Paper He, Z.F.,Lu, Y.F.,Mai, Z.H.,Ren, Z.M. (1999). Ion source assisted pulse laser deposition of carbon nitride thin films. Proceedings of SPIE - The International Society for Optical Engineering 3898 : 404-412. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/81502 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Proceedings of SPIE - The International Society for Optical Engineering
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
He, Z.F.
Lu, Y.F.
Mai, Z.H.
Ren, Z.M.
format Conference or Workshop Item
author He, Z.F.
Lu, Y.F.
Mai, Z.H.
Ren, Z.M.
spellingShingle He, Z.F.
Lu, Y.F.
Mai, Z.H.
Ren, Z.M.
Ion source assisted pulse laser deposition of carbon nitride thin films
author_sort He, Z.F.
title Ion source assisted pulse laser deposition of carbon nitride thin films
title_short Ion source assisted pulse laser deposition of carbon nitride thin films
title_full Ion source assisted pulse laser deposition of carbon nitride thin films
title_fullStr Ion source assisted pulse laser deposition of carbon nitride thin films
title_full_unstemmed Ion source assisted pulse laser deposition of carbon nitride thin films
title_sort ion source assisted pulse laser deposition of carbon nitride thin films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81502
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