Ion source assisted pulse laser deposition of carbon nitride thin films
Proceedings of SPIE - The International Society for Optical Engineering
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Main Authors: | He, Z.F., Lu, Y.F., Mai, Z.H., Ren, Z.M. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81502 |
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Institution: | National University of Singapore |
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