Laser cleaning of etch-induced polymers from via holes

Journal of Applied Physics

Saved in:

Bibliographic Details
Main Authors:	Lu, Y.F., Lee, Y.P., Zhou, M.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80653
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-80653
record_format	dspace
spelling	sg-nus-scholar.10635-806532024-11-10T16:36:55Z Laser cleaning of etch-induced polymers from via holes Lu, Y.F. Lee, Y.P. Zhou, M.S. ELECTRICAL ENGINEERING Journal of Applied Physics 83 3 1677-1684 JAPIA 2014-10-07T02:59:51Z 2014-10-07T02:59:51Z 1998-02-01 Article Lu, Y.F.,Lee, Y.P.,Zhou, M.S. (1998-02-01). Laser cleaning of etch-induced polymers from via holes. Journal of Applied Physics 83 (3) : 1677-1684. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80653 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Applied Physics
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.F. Lee, Y.P. Zhou, M.S.
format	Article
author	Lu, Y.F. Lee, Y.P. Zhou, M.S.
spellingShingle	Lu, Y.F. Lee, Y.P. Zhou, M.S. Laser cleaning of etch-induced polymers from via holes
author_sort	Lu, Y.F.
title	Laser cleaning of etch-induced polymers from via holes
title_short	Laser cleaning of etch-induced polymers from via holes
title_full	Laser cleaning of etch-induced polymers from via holes
title_fullStr	Laser cleaning of etch-induced polymers from via holes
title_full_unstemmed	Laser cleaning of etch-induced polymers from via holes
title_sort	laser cleaning of etch-induced polymers from via holes
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80653
_version_	1821189064554971136

Laser cleaning of etch-induced polymers from via holes

Similar Items