Numerical prediction of etched profile in pyrolytic laser etching

Numerical prediction of etched profile in pyrolytic laser etching

10.1117/12.280576

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Bibliographic Details
Main Authors: Wee, T.S., Lu, Y.F., Chim, W.K.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Carbon tetrachloride
Diffused reflection
Finite element method
Heat conduction analysis
Laser etched profile
Laser induced temperature profile
Numerical laser etching model
Pyrolytic laser etching
Silicon
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81621
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/81621

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