Numerical prediction of etched profile in pyrolytic laser etching

10.1117/12.280576

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書目詳細資料
Main Authors:	Wee, T.S., Lu, Y.F., Chim, W.K.
其他作者:	ELECTRICAL ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
主題:	Carbon tetrachloride Diffused reflection Finite element method Heat conduction analysis Laser etched profile Laser induced temperature profile Numerical laser etching model Pyrolytic laser etching Silicon
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/81621
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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