Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

• Main Authors: Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Cavitation bubble dynamics; High speed photograph imaging; Laser induced backside wet etching; Numerical simulation
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/82032

10.2961/jlmn.2013.03.0012