Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

• Main Authors: Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Cavitation bubble dynamics; High speed photograph imaging; Laser induced backside wet etching; Numerical simulation
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82032
• Institution: National University of Singapore

10.2961/jlmn.2013.03.0012