Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

10.2961/jlmn.2013.03.0012

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Bibliographic Details
Main Authors: Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82032
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Institution: National University of Singapore

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