Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
10.2961/jlmn.2013.03.0012
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Main Authors: | Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82032 |
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Institution: | National University of Singapore |
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