Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

10.2961/jlmn.2013.03.0012

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Bibliographic Details
Main Authors:	Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Cavitation bubble dynamics High speed photograph imaging Laser induced backside wet etching Numerical simulation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82032
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82032
record_format	dspace
spelling	sg-nus-scholar.10635-820322023-10-26T09:02:12Z Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation Xie, X.Z. Hu, M.F. Chen, W.F. Wei, X. Hu, W. Gao, X.Y. Yuan, X.R. Hong, M.H. ELECTRICAL & COMPUTER ENGINEERING Cavitation bubble dynamics High speed photograph imaging Laser induced backside wet etching Numerical simulation 10.2961/jlmn.2013.03.0012 Journal of Laser Micro Nanoengineering 8 3 259-265 2014-10-07T04:24:36Z 2014-10-07T04:24:36Z 2013-12 Article Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H. (2013-12). Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation. Journal of Laser Micro Nanoengineering 8 (3) : 259-265. ScholarBank@NUS Repository. https://doi.org/10.2961/jlmn.2013.03.0012 18800688 http://scholarbank.nus.edu.sg/handle/10635/82032 000329982600012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Cavitation bubble dynamics High speed photograph imaging Laser induced backside wet etching Numerical simulation
spellingShingle	Cavitation bubble dynamics High speed photograph imaging Laser induced backside wet etching Numerical simulation Xie, X.Z. Hu, M.F. Chen, W.F. Wei, X. Hu, W. Gao, X.Y. Yuan, X.R. Hong, M.H. Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
description	10.2961/jlmn.2013.03.0012
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Xie, X.Z. Hu, M.F. Chen, W.F. Wei, X. Hu, W. Gao, X.Y. Yuan, X.R. Hong, M.H.
format	Article
author	Xie, X.Z. Hu, M.F. Chen, W.F. Wei, X. Hu, W. Gao, X.Y. Yuan, X.R. Hong, M.H.
author_sort	Xie, X.Z.
title	Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
title_short	Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
title_full	Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
title_fullStr	Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
title_full_unstemmed	Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
title_sort	cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82032
_version_	1781784045448855552

Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

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