Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

Cavitation bubble dynamics during laser wet etching of transparent sapphire substrates by 1064 nm laser irradiation

10.2961/jlmn.2013.03.0012

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Bibliographic Details
Main Authors: Xie, X.Z., Hu, M.F., Chen, W.F., Wei, X., Hu, W., Gao, X.Y., Yuan, X.R., Hong, M.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Cavitation bubble dynamics
High speed photograph imaging
Laser induced backside wet etching
Numerical simulation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82032
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Institution: National University of Singapore
Description
Summary:10.2961/jlmn.2013.03.0012

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