Laser cleaning of IC mould and its real-time monitoring
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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2014
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sg-nus-scholar.10635-806542015-02-26T16:16:40Z Laser cleaning of IC mould and its real-time monitoring Lu, Y.-F. Song, W.-D. Hong, M.-H. Ren, Z.-M. Chen, Q. Chong, T.-C. DATA STORAGE INSTITUTE ELECTRICAL ENGINEERING Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 8 4811-4813 JAPND 2014-10-07T02:59:52Z 2014-10-07T02:59:52Z 2000-08 Article Lu, Y.-F.,Song, W.-D.,Hong, M.-H.,Ren, Z.-M.,Chen, Q.,Chong, T.-C. (2000-08). Laser cleaning of IC mould and its real-time monitoring. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (8) : 4811-4813. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80654 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Lu, Y.-F. Song, W.-D. Hong, M.-H. Ren, Z.-M. Chen, Q. Chong, T.-C. |
| format |
Article |
| author |
Lu, Y.-F. Song, W.-D. Hong, M.-H. Ren, Z.-M. Chen, Q. Chong, T.-C. |
| spellingShingle |
Lu, Y.-F. Song, W.-D. Hong, M.-H. Ren, Z.-M. Chen, Q. Chong, T.-C. Laser cleaning of IC mould and its real-time monitoring |
| author_sort |
Lu, Y.-F. |
| title |
Laser cleaning of IC mould and its real-time monitoring |
| title_short |
Laser cleaning of IC mould and its real-time monitoring |
| title_full |
Laser cleaning of IC mould and its real-time monitoring |
| title_fullStr |
Laser cleaning of IC mould and its real-time monitoring |
| title_full_unstemmed |
Laser cleaning of IC mould and its real-time monitoring |
| title_sort |
laser cleaning of ic mould and its real-time monitoring |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80654 |
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1681088927864193024 |