Laser cleaning of IC mould and its real-time monitoring

• Main Authors: Lu, Y.-F., Song, W.-D., Hong, M.-H., Ren, Z.-M., Chen, Q., Chong, T.-C.
• Other Authors: DATA STORAGE INSTITUTE
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/80654
• Institution: National University of Singapore

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers