Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates
10.1109/66.827348
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80911 |
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| Institution: | National University of Singapore |