Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Main Authors:	Zheng, Y.-W., Lu, Y.-F., Mai, Z.-H., Song, W.-D.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81097
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81097
record_format	dspace
spelling	sg-nus-scholar.10635-810972015-02-02T04:30:23Z Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser Zheng, Y.-W. Lu, Y.-F. Mai, Z.-H. Song, W.-D. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 10 5894-5898 JAPND 2014-10-07T03:04:38Z 2014-10-07T03:04:38Z 2000-10 Article Zheng, Y.-W.,Lu, Y.-F.,Mai, Z.-H.,Song, W.-D. (2000-10). Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 39 (10) : 5894-5898. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/81097 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Zheng, Y.-W. Lu, Y.-F. Mai, Z.-H. Song, W.-D.
format	Article
author	Zheng, Y.-W. Lu, Y.-F. Mai, Z.-H. Song, W.-D.
spellingShingle	Zheng, Y.-W. Lu, Y.-F. Mai, Z.-H. Song, W.-D. Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
author_sort	Zheng, Y.-W.
title	Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
title_short	Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
title_full	Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
title_fullStr	Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
title_full_unstemmed	Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
title_sort	removing spherical silica particles from si, ge and nip substrates by krf excimer laser
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81097
_version_	1681089009431871488

Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser

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