A golden block self-generating scheme for continuous patterned wafer inspections

10.1109/ICIAP.1999.797634

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Bibliographic Details
Main Authors: Guan, S.-U., Xie, P.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81372
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-813722015-01-15T23:28:44Z A golden block self-generating scheme for continuous patterned wafer inspections Guan, S.-U. Xie, P. ELECTRICAL ENGINEERING 10.1109/ICIAP.1999.797634 Proceedings - International Conference on Image Analysis and Processing, ICIAP 1999 436-443 2014-10-07T03:07:36Z 2014-10-07T03:07:36Z 1999 Conference Paper Guan, S.-U.,Xie, P. (1999). A golden block self-generating scheme for continuous patterned wafer inspections. Proceedings - International Conference on Image Analysis and Processing, ICIAP 1999 : 436-443. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICIAP.1999.797634" target="_blank">https://doi.org/10.1109/ICIAP.1999.797634</a> 0769500404 http://scholarbank.nus.edu.sg/handle/10635/81372 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/ICIAP.1999.797634
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Guan, S.-U.
Xie, P.
format Conference or Workshop Item
author Guan, S.-U.
Xie, P.
spellingShingle Guan, S.-U.
Xie, P.
A golden block self-generating scheme for continuous patterned wafer inspections
author_sort Guan, S.-U.
title A golden block self-generating scheme for continuous patterned wafer inspections
title_short A golden block self-generating scheme for continuous patterned wafer inspections
title_full A golden block self-generating scheme for continuous patterned wafer inspections
title_fullStr A golden block self-generating scheme for continuous patterned wafer inspections
title_full_unstemmed A golden block self-generating scheme for continuous patterned wafer inspections
title_sort golden block self-generating scheme for continuous patterned wafer inspections
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81372
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