Cleaning force in laser cleaning of silicon substrates

Cleaning force in laser cleaning of silicon substrates

10.1117/12.280569

Saved in:
Bibliographic Details
Main Authors: Song, W.D., Lu, Y.F., Ye, K.D., Tee, C.K., Hong, M.H., Liu, D.M., Low, T.S.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Cleaning force
Laser cleaning
Silicon substrate
Thermal stress
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81389
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1117/12.280569

Similar Items